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||SiPDRs are intended for the measurements of the surface impedance of metamaterials and resistive films as well as for the contact-less measurements of the conductivity of semiconductor wafers. Range of thin film materials that can be measured includes resistive layers, thin metal films and conductive polymer films with the surface resistance Rs < 20 kΩ/square.
For semiconductors wafers the upper limit for resistivity measurements is about 1000 Ωcm. Semiconductors with higher resistivity values can be conveniently measured with split post dielectric resonators.
All single post dielectric resonators are custom made.
|Accuracy of measurements of a sample of thickness h||The surface resistance is determined with accuracy of about
|Operational frequency||5 GHz|
|Operational temperature range||-2700C - 1100C|
|Additional equipment needed to perform measurement||Microwave Q-Meter or
Vector Network Analyser
|Measurement procedure||Resonant frequency and Q - factor of the empty resonator and the resonator with investigated sample are measured. The measured values are saved in a text file using format specified in the manual of the resonator. Dedicated application (provided together with the resonator) reads the values listed in the file and calculates the surface resistance Rs.|